The ASML-HMI scanning electron microscopy (SEM) tools enable imaging of nm-sized features to measure and control chip processing performance. The drive of the semiconductor industry to continuously produce smaller, more powerful and more energy-efficient chips requires constant innovation of products, including our SEM products, to match chipmaker’s needs. In this respect, ASML Research provides innovative technical solutions to the company’s development and engineering (D&E) teams that allow them to continue their product roadmap. As the ASML Research SEM competence, the SEM Hardware & Applications group provides such solutions to the SEM D&E groups in Delft (for multi-beam tools) and San Jose (for single-beam tools).
Your Assignment
Our SEM tool design and operation relies on advanced simulations of the electron optics in the column. In this assignment you will be working on extending our electron optics simulation capabilities. You will use the existing simulation suite to build further understanding of the impact of electron optics components on the probe. This will entail an investigation into the impact of non-idealities in the column, e.g. offset electron-optics elements, on the probe. You will combine the simulation insights with probe characteristics obtained experimentally to draw conclusions on how to make our simulations resemble better our tools.
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